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Silicon Carbide Tubes
In the LPCVD equipment,
the sic
tube is one of
the cores of the entire equipment, with an inner tube and an outer tube. LPCVD equipment is a kind of CVD equipment, which generates solid reactants through chemical reaction of mixed gases under
low pressure and high temperature conditions and deposits them on the surface of silicon wafers to form thin films.
Features of DSTC Silicon
Tube
1
CZ for mono-crystalline
silicon material, high purity, mature processing and cleaning process
Specifications of DSTC
Silicon Tube
Product Length
100mm-2000mm
Product Diameter
80mm-1000mm
Product Structure
Welded, Integrated
Conductive Type/Doping
Custom
Resistivity
Low Resistance (E.G.<0.015,
<0.02...).
Moderate Resistance (E.G. 1-4);
High Resistance (E.G. 60-90);
Customer Customization
Material Type
Polycrystal/Single Crystal
Crystal Orientation
Customized
Silicon Tube Gallery
It applied to the
high-temperature furnace, wafer high-temperature process, deposition process area.
As one of silicon tube manufacturers and
silicon tube suppliers, we can provide kinds of related products for sale, and the silicone liner price is
reasonable, if you have needs, please contact us.
There are many silicon carbide semiconductor
companies in
China, but we are one of the best choices for you.