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Silicon Injector
The Silicon Injector is a crucial component in the heat
treatment process and deposition of silicon wafers, directly impacting their heat treatment effectiveness and deopsition performance. Heat treatment of silicon wafers plays a vital role in
semiconductor and integrated circuit processing, with its outcome closely tied to the final performance of the wafer.
Silicon heat treatment
encompasses oxidation, diffusion, annealing, and other processes. During this procedure, semiconductor silicon must be placed inside the furnace body, requiring a pipeline for gas entry into the
furnace body known as the silicon Injector.
Applied to HP and deposition
equipment, silicon nozzle injector is a key component to
deliver chemical gases. The deposition thickness is up to 300μm, 10 times of that of quartz injectors.
Features of DSTC Silicon
Injector
1
Adopt integrated drilling
process.
2
Realize customized
processing of any length.(3-14mm aperture)
3
High purity of raw
materials.
4
High metal contamination
control to meet the requirements of the silicon wafer treatment process.
5
Same coefficient of the
thermal expansion.
6
The deposition thickness is
up to 300μm, 10 times of that of quartz injectors.
Specifications of DSTC
Silicon Injector
Product Length
100mm-1400mm
Aperture Size
4mm-12mm
Product Structure
Welded, Integrated, Threaded
Connection
Conductive Type/Doping
Custom
Resistivity
Low Resistance (E.G.<0.015,
<0.02...). ;
Moderate Resistance (E.G. 1-4);
High Resistance (E.G. 60-90);
Customer Customization
Material Type
Polycrystal/Single Crystal
Silicon Injector
Gallery
Silicon Injector is applied
in the HT and deposition machine as the process gas channel. It's the critical component in the HT and deposition process.
If you want to know more about silicon in semiconductor
industry, please visit our website.